PRODUCTS

AQUA ROBO

ARB series

Automated Titration Analyzer

Easy and high-precision analysis of chemicals like plating solution,
developing solution, and sulfated water!

Accurate concentration analysis, stable chemical control, and compact unit that can be installed anywhere. The reagent volume and waste liquid volume are lesser than ever and the low-cost makes it environment friendly.

  • Productivity
    UP
  • Quality
    stability
    UP
  • Reduced
    cost
  • Can be used
    for various types
    of chemicals*

*Suitable for various types of chemicals. Please contact us for details.

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Product features

  • Cuts the reagent volume by about 1/3,
    and waste liquid volume by about 1/2

    The compact size makes it possible to analyze smaller quantity of reagents compared to traditional analyzers. Also, it is simple and fast with shorter analysis and implements accurate titration analysis unmatched by conventional devices.

  • Simple, compact, and can be installed anywhere
    1. Measurement can be done easily by just connecting a tube on the device side.
    2. The compact size keeps the layout-related worries away.
    3. The inner section can be checked instantly, therefore maintenance is also easy.
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  • The status can be known easily by checking the measurement results from the operation screen

    All the analysis results, error history, etc., can be seen at a glance by hard-wiring the counter signals, various types of re-supply signals, and alarm signals with the respective equipment. Input of all warnings/chemical supply signals on the machine side also makes it possible to provide replenishment based on the analysis results feedback.

    Analysis result graph
    *Plotting the analysis results of 24 analyses

Specifications

Measurement specifications
  Type Process name/
device name		 Measurement items
1 Plating-related Copper sulfate electroplating H2SO4 (sulfuric acid)/Cu (copper)/Cl (chlorine)/Fe3+ (ferric ion)
2 Electroless copper plating NaOH (sodium hydroxide)/HCHO (formalin)/Cu (copper)
3 Electroless nickel plating Ni (nickel)/NaH2PO2 (sodium hypophosphite)/pH
4 Nickel electroplating Ni (sulfuric acid/nickel chloride)/Cl (chlorine)/H3BO3 (boric acid)
5 Electroless gold plating Au (gold)/pH
6 Gold electroplating (1) Au (gold)/pH
7 Gold electroplating (2) Au (gold)/Ni (nickel)/Pd (palladium)
8 Gold electroplating (3) Au (gold)/Ni (nickel)/Pd (palladium)/Co (cobalt)
9 Silver plating Ag (silver)/CN (cyanide)/pH
10 Cyanide plating CN (cyanide)/acid volume (acid)
11 Half/Soft etching Soft etching (1) Cu (copper)/H2SO4 (sulfuric acid)/H2O2 (hydrogen peroxide)
12 Soft etching (2) Cu (copper)/Na2S2O8 (sodium persulfate)
13 Soft etching (3) Cu (copper)/H8N2O8S2 (ammonium persulfate)
14 Development Development (1) Na2CO3 (sodium carbonate)/K2CO3 (potassium carbonate)/Resist usage (resist)
15 Development (2) TMAH (tetramethylammonium hydroxide)/Resist usage (resist)
16 Development (3) MEK (methyl ethyl ketone)/TEA (triethanolamine)/Resist usage (resist)
17 Blackening Blackening treatment NaOH (sodium hydroxide)/NaClO2 (sodium chlorite)/K2S2O8 (potassium persulfate)
18 Desmear Desmear treatment NaOH (sodium hydroxide)/KMnO4 (potassium permanganate)
19 Degreasing/Peeling Degreasing treatment/
Peeling treatment		 NaOH (sodium hydroxide)/KOH (potassium hydroxide)
20 Acid washing Acid washing HCl (hydrochloric acid)/H2SO4 (sulfuric acid)/HNO3 (nitric acid)/CH3COOH (acetic acid) etc.
21 Other
(cleaning,
specialized
etching, etc.)		 NaOH+H2O2 NaOH (sodium hydroxide)/H2O2 (hydrogen peroxide)
NaCO3+H2O2 NaCO3 (sodium carbonate)/H2O2 (hydrogen peroxide)
Aluminum etching (1) Al (aluminum)/HCl (hydrochloric acid)
Aluminum etching (2) Al (aluminum)/H2SO4 (sulfuric acid)
Wafer cleaning etc. NH4 (ammonium)/HF2 (hydrofluoric acid)/H2O2 (hydrogen peroxide)/HNO3 (nitric acid)

Can also be used for chemicals not mentioned above

Equipment specifications
NameAQUA ROBO Model codeARB series
Weight6 kg External dimensions (mm)300 (W) x 405 (H) x 200 (D)
Electrical sourceAC 100 V Intended useAutomated titration analysis of various sorts of chemicals
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