PRODUCTS

AQUA AQCESS CONTROLLER

Series NAC-7000, 9000, 10000

Etching Controllers
CuCl2(H2O2)/FeCl3/CuCl2(NaClO3)
  • Etching

Stabilizes the quality and productivity
through constant maintenance of the
adequate concentration

Our very own unique high-precision sensors and advanced control controllers give this product an undisputed ability to suitably control the productivity/quality/cost in the etching process

  • Productivity
    UP
  • Production
    stability
    UP
  • Quality
    stability
    UP
  • Real time
    display
product image

Product features

  • Fine pattern support

    Fine patterns cannot be achieved without a high-precision chemical control. High control of HCL ± 0.05 M/L is possible with the use of AQUA AQCESS CONTROLLER.

    • After development image
      After development
    • After etching image
      After etching
  • Production state can be checked any time

    With the logger function, you can instantly check whether the concentration is fluctuating or is stable during the production stage and send a prompt feedback to the production site. This function is a boon for production supervisors.

    These are our unique features
    Various types of sensors
    High-precision/high-stability
    Small-sized/light-weight
    Direct & real time measurements
    product image
  • Increased line operating ratio

    The high-precision sensors and controllers can maintain the chemicals in a stable state, thereby significantly shortening the time taken for setting the conditions of the etching equipment. They also eliminate troubles like development of abnormal chemical concentration due to sensor malfunction, thereby ensuring constantly stable conditions for production.

    Comparison of loaded panels (m²) processed in
    about 1 month (25 days)
    Line operating ratio UP by about 30%
  • Finishing across the width of product line is always stable

    Drastically improves the variations in line width and reduces malfunctions.

    flow image
    Developed film finish width variations (σ)

    Variations in the width of the etched patterns are compared.

    About 80% improvement in pattern width variations
  • Reduction in amount of chemical used

    Stabilization of the chemical concentration can reduce the amount of chemical used.

    graf
    Use of AQUA controller improves the stability.
    Comparison of amount of chemicals used in a 5,000 m² (avg. copper thickness 35 um × double-sided plate) process
    About 20% reduction in amount of chemical used
  • Connection flowchart

    Individual measurement of chemical concentrations in real time. Parameters can be controlled as per the production conditions/quantity/operating state. Is also equipped with LAN communication function, therefore control data can be monitored on a PC under network environment. Also has expansion function thorough which addition sensors or other functions can be added.

    Connection flowchart

Specifications

Applicable chemicals CuCl2(H2O2)/FeCl3/CuCl2(NaClO3)
Model code NAC-7100/7200/7110 NAC-9100/9200/9110 NAC11000/12000/11100
Display device 10-inch LCD display 10-inch LCD display 12-inch LCD display
Display
range		 SG 1.100-1.400/1.500/
1.200-1.600		 1.100-1.400/1.500/
1.200-1.600		 1.100-1.400/1.500/
1.200-1.600
HCl 0.00-6.00 m/L 0.00-6.00 m/L 0.000-6.000 m/L
H2O2
FeCl3
NaClO3		 0.00-100.0 0.00-100.0 0.00-100.00
TEMP 0.00-100.0 0.00-100.0 0.00-100.00
Measurement accuracy Within 3 % of measurable full scale
Control output Pump control output/upper and lower limit alarm output/no-voltage contact relay output/TTL output, etc.
Source voltage DC 24 V
External dimensions (mm) /
weight		 310 (W) × 210 (H) ×99 (D) 4.3kg 328 (W) × 225 (H) ×99 (D) 4.3kg
P control ○（Standard spec） ○（Standard spec） ○（Standard spec）
Estimated chemical
input		 △（Option） ○（Standard spec） ○（Standard spec）
Parameter bank △（Option） ○（Standard spec） ○（Standard spec）
Graph function ○（Standard spec） ○（Standard spec） ○（Standard spec）
Logging communication × × ○（Standard spec）
Other comunication function
（Serical／Ethernet）		 × △（Option） △（Option）
Inquiries Concerning Products and Services
inquiries by e-mail
Contact Us
Inquiries by phone
+81-72-726-6665